The 30 highest-paid CEOs in tech

Combined, the top 30 CEOs in tech made $662 million in 2016, according to a new report out from Equilar, an executive compensation data firm, in partnership with the New York Times.

The study only looked at executives at publicly-traded companies with more than $1 billion in revenue that had filed proxy statements before May 1.

Each exec's total compensation for 2016 includes salary, cash bonuses, the grant-date value of stock option awards, and other compensation, which includes perks like security expenses. (You can read Equilar and The New York Times full methodology here).

Of the list of the top 200 highest-paid CEOs, 30 are in the tech industry, helming companies that make everything from semiconductors to cloud services.

Here's which tech CEOs brought home the most bacon in 2016:

30. Ursula Burns, Xerox: $13.1 million

29. Marc Benioff, Salesforce: $13.2 million

28. Glen Post, CenturyLink: $13.6 million

27. Frank Bisignano, First Data: $13.8 million

26. William Brown, Harris Corp: $13.9 million

25. Patrick Gelsinger, VMware: $14.8 million

24. Richard Templeton, Texas Instruments: $15 million

23. Chuck Robbins, Cisco: $16 million

22. Lowell McAdam, Verizon: $17.4 million

21. Satya Nadella, Microsoft: $17.7 million

20. Pierre Nanterme, Accenture: $18.5 million